Fractures properties of InP microcantilevers by hetero-micromachining

Sensors and Actuators, A: Physical

Volumn 76, Issue 1-3, 1999, Pages 395-402

  Fricke, K ^a   Peiner, E ^a   Chahoud, M ^a   Schlachetzki, A ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; COMPUTER SIMULATION; DEFLECTION (STRUCTURES); EPITAXIAL GROWTH; ETCHING; FRACTURE; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTING SILICON;

FRACTURE PROPERTIES; HETEROMICROMACHINING; MICROCANTILEVERS; STATIC DEFLECTION METHODS;

MICROMACHINING;

EID: 0343932626     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00038-2     Document Type: Article

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