Optimal design of a micromachined force gauge under uncertainty

Journal of Micromechanics and Microengineering

Volumn 15, Issue 12, 2005, Pages 2353-2365

  Mawardi, A ^a   Pitchumani, R ^a  

^a UNIVERSITY OF CONNECTICUT   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; MICROMACHINING; MICROSTRUCTURE; RANDOM PROCESSES; STRESS ANALYSIS;

DESIGN PARAMETERS; GEOMETRIC DESIGN; MICRODEVICES; MICROMACHINED FORCE GAUGE;

PRODUCT DESIGN;

EID: 27944450708     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/15/12/018     Document Type: Article

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