Investigations on possibilities of inline inspection of high aspect ratio microstructures

Microsystem Technologies

Volumn 13, Issue 3-4, 2007, Pages 319-325

  Engelke, Rainer ^a   Ahrens, Gisela ^a   Arndt Staufenbiehl, Norbert ^b   Kopetz, Stefan ^c   Wiesauer, Karin ^d   Löchel, Bernd ^e   Schröder, Henning ^b   Kastner, Johann ^f   Neyer, Andreas ^c   Stifter, David ^d   Grützner, Gabi ^a  

^a MICRO RESIST TECHNOLOGY GMBH   (Germany)

^b FRAUNHOFER IZM   (Germany)

^c TU DORTMUND UNIVERSITY   (Germany)

^d Upper Austria Research GmbH   (Austria)

^e HAHN MEITNER INSTITUT   (Germany)

^f UNIVERSITY OF APPLIED SCIENCES UPPER AUSTRIA   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; COMPUTERIZED TOMOGRAPHY; MICROELECTROMECHANICAL DEVICES; OPTICAL VARIABLES MEASUREMENT; PROCESS CONTROL; X RAY LITHOGRAPHY;

INLINE PROCESS INSPECTION; INTERFEROMETRIC OPTICAL METHODS; MICROMECHANICAL GEAR WHEELS; RESIDUAL SOLVENT CONTENT;

MICROSTRUCTURE;

EID: 33845804830     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0170-7     Document Type: Article

References (4)

1. Jian L, Desta YM, Goettert J, Bednarzik M, Loechel B, Yoon-young J, Aigeldinger G, Singh V, Ahrens G, Gruetzner G, Ruhmann R, Degen R (2003) SU-8 based deep X-ray lithography/LIGA. SPIE 4797:394
2. Kastner J, Schlotthauer E, Salaberger D, Simon M, Sauerwein C (2005) Mikro-Computertompgraphie für die Charakterisierung und Vermessung von Mikrobauteilen, Jahrestagung der DGZfP, 1-4 Mai, Rostock
3. Kouba J, Engelke R, Bednarzik M, Ahrens G, Scheunemann HU, Gruetzner G, Loechel B, Miller H, Haase D (2006) SU-8 - promising resist for advanced LIGA applications for high aspect ratio micro parts (this issue)
4. Wiesauer K, Pircher M, Goetzinger E, Bauer S, Engelke R, Ahrens G, Gruetzner G, Hitzenberger C, Stifter D (2005) En-face scanning optical coherende tomography with ultra-high resolution for material investigation. Opt Express 13:1015-1024. http://www.opticsinfobase.org/abstract.cfm?URI=oe-13-3-1015