Compensation of the anisotropic behavior of single crystalline silicon in a 3D tactile sensor

Sensors and Actuators, A: Physical

Volumn 134, Issue 2, 2007, Pages 374-381

  Bos, E J C ^a   Heldens, R W P ^a   Delbressine, F L M ^a   Schellekens, P H J ^a   Dietzel, A ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Anisotropic; Nanometrology; Silicon; Tactile sensor

Indexed keywords

CRYSTALLOGRAPHY; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; SENSORS; SINGLE CRYSTAL SURFACES; SUSPENSIONS (COMPONENTS);

ANISOTROPIC MECHANICAL BEHAVIOR; ISOTROPIC SUSPENSION STIFFNESS;

SILICON;

EID: 33847383276     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.05.043     Document Type: Article

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