Influence of polar distribution on piezoelectric response of aluminum nitride thin films

Applied Physics Letters

Volumn 92, Issue 9, 2008, Pages

  Kamohara, Toshihiro ^a   Akiyama, Morito ^a   Kuwano, Noriyuki ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; CRYSTAL ORIENTATION; PIEZOELECTRIC MATERIALS; SPUTTERING;

ALUMINUM NITRIDE THIN FILMS; POLAR DISTRIBUTION;

THIN FILMS;

EID: 40549096126     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2892041     Document Type: Article

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