Role of kinetic energy of sputtered particles in thin film formation

Surface Science

Volumn 386, Issue 1-3, 1997, Pages 231-240

  Taga, Yasunori ^a   Takahasi, Riichi ^a  

^a Rd Management Section   (Japan)

Author keywords

Coatings; Ion solid interactions; Sputter deposition; Sputtering

Indexed keywords

COMPUTER SIMULATION; DECOMPOSITION; FILM PREPARATION; GAS ADSORPTION; ION BOMBARDMENT; MICROSTRUCTURE; MOLECULAR DYNAMICS; MONTE CARLO METHODS; SPUTTER DEPOSITION; THIN FILMS;

KINETIC ENERGY;

FILM GROWTH;

EID: 0031251294     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(97)00313-0     Document Type: Article

References (36)

1. P. Sigmund, Phys. Rev. 184 (1969) 383.
2. J.C. Pivin, J. Mater. Sci. 18 (1983) 1267.
3. P.J. Martin, J. Mater. Sci. 21 (1986) 1.
4. Y. Taga, Proc. SPIE 1275 (1990) 110.
5. M. Kaminsky, Atomic and Ionic Impact on Metal Surfaces, Springer-Verlag, Berlin, 1965.
6. G. Carter, J.S. Colligon, Ion Bombardment of Solids, Elsevier, New York, 1988.
7. R. Berisch, in: R. Berisch (Ed.), Sputtering by Particle Bombardment, Topics in Applied Physics, Vol. 52, Springer-Verlag, Berlin, 1983.
8. H.H. Andersen, H.L. Bay, in: R. Berisch (Ed.), Sputtering by Particle Bombardment, Topics in Applied Physics, Vol. 52, Springer-Verlag, Berlin, 1983, p. 145.
9. J.W. Coburn, Thin Solid Films 64 (1979) 371.
10. R.V. Stuart, G.K. Wehner, J. Appl. Phys. 35 (1964) 1819.
11. A.W. Kleinsasser, R.A. Buhrman, Appl. Phys. Lett. 37 (1980) 841.
12. R.R. Olson, G.K. Wehner, J. Vac. Sci. Technol. 14 (1977) 319.
13. D.W. Hoffman, J.A. Thornton, Thin Solid Films 40 (1977) 355.
14. D.W. Hoffman, J.A. Thornton, J. Vac. Sci. Technol. 16 (1979) 134.
15. Y. Kageyama, Y. Taga, Appl. Phys. Lett, 55 (1989) 1035.
16. Y. Gotoh, Y. Taga, J. Appl. Phys. 67 (1990) 1030.
17. M.A. Rudat, G.M. Morrison, Surf. Sci. 82 (1979) 549.
18. T. Takagi, Physics of Thin Films, Vol. 13, M.H. Francome, J.L. Vossen, Vol. 1, Academic Press, Boston, 1987.
19. T. Ohwaki, Y. Taga, Jpn. J. Appl. Phys. 23 (1984) 1466.
20. M.W. Thompson, Philos. Mag. 18 (1968) 377.
21. Y. Taga, in: A. Benninghoven, R.J. Colton, D.S. Simons, H.W. Werner (Eds.), Secondary Ion Mass Spectrometry, SIMS V, Vol. 32, Springer, New York, 1985.
22. Y. Taga, K. Inoue, K. Satta, Surf. Sci. 119 (1982) L363.
23. K. Inoue, Y. Taga, Surf. Sci. 140 (1984) 491.
24. K. Inoue, Y. Taga, Surf. Sci. 147 (1984) 427.
25. T. Motohiro, Y. Taga, Surf. Sci. 134 (1983) L494.
26. T. Motohiro, Y. Taga, Thin Solid Films 112 (1984) 161.
27. T. Ohwaki, Y. Taga, Appl. Phys. Lett. 55 (1989) 837.
28. Y. Taga, MRS Symp, Proc. 128 (1989) 41.
29. J. Roth, J. Appl. Phys. 52 (1983) 91.
30. M. Saidoh, H. Gnaser, W.O. Hofer, Appl. Phys. A40 (1986) 197.
31. S.M. Sze, J. Appl. Phys. 38 (1967) 2951.
32. J.L. Vossen, W. Kern, Thin Film Processes, Academic Press, New York, 1978.
33. B.N. Chapman, Glow Discharge Process, Wiley, New York, 1980.
34. Y. Sawada, Y. Taga, Thin Solid Films 110 (1983) L129.
35. W.D. Westwood, Thin Film Physics, Vol.14, M.H. Francome, J.L. Vossen, Academic Press, New York, 1989.
36. S.M. Rossnagel, J. Vac. Sci. Technol. A 7 (1989) 1025.