Effects of bottom electrodes on the orientation of AlN films and the frequency responses of resonators in AlN-based FBARs

Thin Solid Films

Volumn 447-448, Issue , 2004, Pages 610-614

  Lee, Jin Bock ^a   Jung, Jun Phil ^a   Lee, Myung Ho ^a   Park, Jin Seok ^a  

^a Hanyang University   (South Korea)

Author keywords

(0 0 2) Orientation; Electrode metal; Film bulk acoustic resonator; Mo; Piezoelectric AlN film; Resonator frequency response; Resonator return loss; Texture coefficient

Indexed keywords

ACOUSTIC RESONATORS; CRYSTAL STRUCTURE; ELECTRODES; FREQUENCY RESPONSE; MONOLITHIC INTEGRATED CIRCUITS; PIEZOELECTRIC MATERIALS; SCANNING ELECTRON MICROSCOPY; THERMOELASTICITY; X RAY DIFFRACTION;

ELECTRODE METALS; REACTIVE SPUTTERING; RESONATOR RETURN LOSS; TEXTURE COEFFICIENT;

THIN FILMS;

EID: 1342344847     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.07.023     Document Type: Conference Paper

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