Computational models of a nano probe tip for static behaviors

Scanning

Volumn 30, Issue 1, 2008, Pages 47-55

  Feng, Shaw C ^a   Vorburger, Theodore V ^a   Che, Bong Joung ^a   Dixson, Ronald G ^a   Fu, Joseph ^a   Ma, Li ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Atomic force microscope other scanned probe microscopes; Computer simulation; Metrology; Scanned probe

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MEASUREMENT ERRORS; MEASUREMENT THEORY;

AFM CANTILEVERS; FINITE ELEMENT MODEL; SCANNED PROBES;

COMPUTATIONAL METHODS;

CARBON NANOTUBE; SILICON;

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; FINITE ELEMENT ANALYSIS; MECHANICAL PROBE; NANOANALYSIS; PRIORITY JOURNAL; REVIEW; SEMICONDUCTOR; SIMULATION;

EID: 40349098924     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.20079     Document Type: Review

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