Analysis of tip effects on the dynamic characteristics of V-shaped atomic force microscope probes

Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

Volumn , Issue , 2005, Pages 65-68

  Chen, Kun Nan ^a   Huang, Jen Ching ^a  

^a TUNG NAN INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; NATURAL FREQUENCIES; PROBES; SCANNING; STIFFNESS;

CANTILEVERED PROBES; DYNAMIC MODES; MODAL SENSITIVITIES; TIP EFFECTS;

ATOMIC FORCE MICROSCOPY;

EID: 33749046700     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2005.26     Document Type: Conference Paper

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