Preparation of α-alumina/polymethacrylic acid composite abrasive and its CMP performance on glass substrate

Microelectronic Engineering

Volumn 85, Issue 4, 2008, Pages 714-720

  Zhang, Zefang ^a   Lei, Hong ^a  

^a SHANGHAI UNIVERSITY   (China)

Author keywords

Al2O3 g PMAA composite abrasive; CMP; Glass substrate

Indexed keywords

ABRASIVES; AGGLOMERATION; CHEMICAL MECHANICAL POLISHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GLASS; HARDNESS;

COMPOSITE ABRASIVES; DISPERSION STABILITY; GLASS SUBSTRATES; POLYMETHACRYLIC ACID;

ALUMINA;

EID: 40249085655     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.01.001     Document Type: Article

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