An investigation of the plasma composition in plasma-enhanced hot filament catalytic chemical vapor deposition of carbon nanotubes

Plasma Chemistry and Plasma Processing

Volumn 28, Issue 1, 2008, Pages 123-146

  Gulas M ^a,b   Cojocaru, C S ^a   Le Normand, F ^a   Farhat, S ^c  

^a INSTITUT DE PHYSIQUE ET CHIMIE DES MATÉRIAUX DE STRASBOURG   (France)

^b Faculty of Natural Sciences   (Slovakia)

^c UNIVERSITÉ PARIS 13   (France)

Author keywords

Carbon nanotubes; Chemical kinetics; Plasma composition; Plasma enhanced CVD

Indexed keywords

ETCHING ACTIVITY; GAS PHASE FORMATION; NANOTUBE PRECURSORS; PLASMA COMPOSITION;

CARBON NANOTUBES; CATALYST ACTIVITY; MATHEMATICAL MODELS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REACTION KINETICS; SCANNING ELECTRON MICROSCOPY;

PLASMA DEVICES;

EID: 39749173024     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11090-007-9111-1     Document Type: Article

References (55)

1. Loiseau A, Gadelle P, Peigney P, Blasé X, Charlier JC, Ducastelle M (2006) In Understanding carbon nanotubes: from theory to applications, chap 2. Springer, Berlin, p 49
2. Borisenko DN, Kolesnikov NN, Kulakov MP, Kveder VV (2002) Int J Nanosci 1:235
3. Dresselhaus MS, Dresselhaus G, Avouris P (2001) in Carbon nanotubes: synthesis, structure, properties and applications, Springer, Berlin, p 29
4. Melechko AV, Merkulov VI, MacKnight TE, Guillorn MA, Klein KL, Lowndes DH, Simpson ML (2005) J Appl Phys 97:041301
5. Baker RTK (1989) Carbon 27:315
6. Cojocaru CS, Senger A, Le Normand F (2006) J of Nanosci Nanotechnol 6:1
7. Liu K, Jiang KL, Feng C, Chen Z, Fan SS (2005) Carbon 43:2850
8. Ni L, Kuroda K, Zhou LP, Kizuka T, Ohta K, Matsuishi K, Nakamura J (2006) Carbon 44:2265
9. Svrcek V, Dintzer T, Paillaud JL, Kleps I, Cracioniou F, Pham-Huu C, Ledoux MJ, Le Normand F (2006) J Chem Physics 124:184705
10. Frenklach M, Wang H (1991) Phys Rev B 43:2
11. Coltrin ME, Dandy DS (1993) J Appl Phys 74:9
12. Mankelevich YA, Rakhimov AT, Suetin NV (1998) Diam Rel Mater 7:1133
13. Gicquel A, Hassouni K, Farhat S, Breton Y, Scott CD, Lefebvre M, Pealat M (1994) Diam Rel Mater 3:581
14. Lombardi G, Hassouni K, Stancu GD, Mechold L, Ropcke J, Gicquel A (2005) J Appl Phys 98:053303
15. Hinkov I, Farhat S, Scott CD (2005) Carbon 43:2453
16. Hash D, Bose D, Govindan TR, Meyyappan M (2003) J Appl Phys 93:10
17. Hash DB, Bell MS, Teo KBK, Cruden BA, Milne WI, Meyyappan M (2005) Nanotechnology 16:925
18. Ren ZF, Huang ZP, Xu JW, Wang JH, Bush P, Siegal MP, Provencio PN (1998) Science 282:1105
19. Cojocaru CS, Le Normand F (2006) Thin Solid Films 515:53
20. Cojocaru CS, Larijani M, Misra DS, Singh MK, Veis P, Le Normand F (2004) Diam Rel Mater 13:270
21. Larijani MM, Cojocaru CS, Crégut O, Le Normand F (2007) Appl Surf Sci 253:4051
22. Herzberg G (1950) Molecular spectra and molecular structure, vol 1, 2nd edn. Van Nostrand Reinhold Company, New York
23. Pearse RWB, Gaydon AG (1984) The identification of molecular spectra. Chapman and Hill, New York
24. Veis P, Cojocaru CS, Le Normand F (2004) Acta Physica Universitatis Comenianae, XLIV-XLV, 95
25. Kee RJ, Rupley FM, Miller JA et al (2005) CHEMKIN Release 4.0.2, Reaction Design. San Diego, CA
26. Smith JA, Cameron E, Ashfold MNR, Mankelevitch YA, Suetin NV (2001) Diam Rel Mater 10:358
27. Hickmott TW (1960) J Chem Phys 32:810
28. Zheng W, Gallagher A (2006) Thin Solid Films 501:21
29. Udelson BJ, Creedon JE, French JC (1957) J Appl Phys 28:6
30. Massines F, Rabehi A, Decomps P, Ben Gadri R, Ségur P, Mayoux C (1998) J Appl Phys 83:6
31. Palmero A, van Hattum ED, Arnoldbik WM, Habraken FHPM (2004) Surf Coat Tech 188-189:392
32. Gu L, Lieberman MA (1998) J Vac Sci Technol A 6:2960
33. McGinnis SP, Kelly MA, Hagstrom SB (1995) Appl Phys Lett 66:3117
34. Smith GP, David Golden M et al, GRI-Mech 3.0, http://www.me.berkeley.edu/ gri_mech/. Accessed 22 May 2006
35. Coda Zabetta E, Hupa M (2006) A detailed kinetic mechanism with methanol for simulating biomass combustion and N-pollutants, submitted to international scientific journal, http://web.abo.fi/fak/ktf/cmc/research/index.html. Accessed 11 May 2006
36. Burcat A, Ideal gas thermodynamic data in polynomial form for combustion and air pollution use, http://www.garfield.chem.elte.hu/Burcat/burcat.html. Accessed 18 July 2006
37. Bhimarasetti G, Sunkara MK (2003) Thin Solid Films 440:78
38. Marinov NM, Pitz WJ, Westbrook CK, Vincitore AM, Castaldi MJ, Senkan SM (1998) Combust Flame 114:192
39. Howard JB et al, MIT combustion research, http://www.web.mit.edu/anish/ www/MITcomb.html. Accessed 18 July 2006
40. Grujicic M, Cao G, Gersten B (2002) Appl Surf Sci 191:223
41. Grujicic M, Cao G, Gersten B (2002) Mater Sci Eng B 94:247
42. Hofmann S, Cantoro M, Kleinsorge B, Casiraghi C, Parvez A, Robertson J, Ducati G (2005) J Appl Phys 98:034308
43. Gohier A, Minea TM, Djouadi MA, Granier A (2007) J Appl Phys 101:054317
44. Srivastava SK, Vankar VD, Kumar V (2006) Thin Solid Films 515:1552
45. Wang EG, Guo ZG, Ma J, Zhou MM, Pu YK, Liu S, Zhang GY, Zhong DY (2003) Carbon 41:1827
46. Bratescu MA, Suda Y, Sakai Y, Saito N, Takai O (2006) Thin Solid Films 515:1314
47. Smith JA, Wills JB, Moores HS, Orr-Ewing AJ, Mankelevitch YA, Ashfold MNR, Suetin NV (2002) J Appl Phys 92:672
48. Farhat S, Silva F, Hassouni K, Gicquel A (1997) Joint International Meeting of the Electrochemical Society, Paris, 1.9-5.9
49. Hassouni K, Lombardi G, Duten X, Haagelar G, Silva F, Gicquel A, Grotjohn TA, Capitelli M, Ropcke J (2006) Plasma Sources Sci Technol 15:117
50. Kutasi K, Hartmann P, Bánó G, Donkó Z (2005) Plasma Sources Sci Technol 14:S1
51. Muraoka K, Uchino K, Yamagata Y, Noguchi Y, Mansour M, Suanpoot P, Narishige S, Noguchi M (2002) Plasma Sources Sci Technol 11:A143
52. Bell MS, Lacerda RG, Teo KBK, Rupesinghe NL, Amaratunga GAJ, Milne WI, Chhowalla M (2004) Appl Phys Lett 85:7
53. Woodall J, Agúndez M, Markwick-Kemper AJ, Millar TJ, udfa 05-The UMIST database for Astrochemistry, http://www.udfa.net/. Accessed 13 May 2006
54. NIST Chemical Kinetics Database on the Web, Standard Reference Database 17, Version 7.0, Release 1.4, http://www.kinetics.nist.gov/kinetics/index.jsp. Accessed 22 June 2006
55. Konnov AA (1998) Detailed reaction mechanism for small hydrocarbons combustion. Release 0.4 http://www.homepages.vub.ac.be/~akonnov/. Accessed 27 May 2006