On the role of activation mode in the plasma- and hot filaments-enhanced catalytic chemical vapour deposition of vertically aligned carbon nanotubes

Thin Solid Films

Volumn 515, Issue 1, 2006, Pages 53-58

  Cojocaru, C S ^a   Le Normand, F ^a  

^a INSTITUT DE PHYSIQUE ET CHIMIE DES MATÉRIAUX DE STRASBOURG   (France)

Author keywords

Carbon nanoparticles; Carbon nanotubes; Catalytically grown carbon; Chemical vapour deposition; Transmission electron microscopy

Indexed keywords

CARBON NANOPARTICLES; CATALYTIC CHEMICAL VAPOR DEPOSITION (CCVD); CATALYTICALLY GROWN CARBON; GAS DISCHARGE PLASMAS;

CATALYSTS; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA ETCHING; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

CARBON NANOTUBES;

EID: 33750014818     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.137     Document Type: Article

References (26)

1. Dresselhaus M.S., Dresselhaus G., and Avouris P. Carbon Nanotubes: Synthesis, Structure, Properties and Applications (2001), Springer, Berlin 29
2. Ebbesen T.W. In: Ebbesen T.W. (Ed). Carbon Nanotubes: Preparation and Properties (1997), CRC Press, Boca Raton
3. Huczko A. Appl. Phys., A 74 (2002) 617
4. Meyyappan M., Delzeit L., Cassell A., and Hash D. Plasma Source Technol. 12 (2002) 205
5. Melechko A.V., Merkulov V.I., MacKnight T.E., Guillorn M.A., Klein K.L., Lowndes D.H., and Simpson M.L. J. Appl. Phys. 97 (2005) 041301
6. Cojocaru C.S., Larijani M., Misra D.S., Singh M.K., Veis P., and Le Normand F. Diamond Relat. Mater. 13 (2004) 270
7. Murakami Y., Yamakita S., Okubo T., and Maruyama S. Chem. Phys. Lett. 375 (2003) 393
8. Hata K., Futaba D.N., Mizuno K., Namai T., Yumura M., and Iijima S. Science 306 (2004) 1362
9. Zhang Y.F., Tang Y.H., Zhang Y., Lee C.S., Bello I., and Lee S.T. Chem. Phys. Lett. 330 (2000) 48
10. Kurt R., Klinke C., Bonard J.M., Kern K., and Karami A. Carbon 39 (2001) 2163
11. Dillon A.C., Mahan A.H., Alleman J.L., Heben M.J., Parilla P.A., and Jones K.M. Thin Solid Films 430 (2003) 292
12. Chhowalla M., Teo K.B.K., Ducati C., Rupesinghe N.L., Amaratunga G.A.J., Ferrari A.C., Roy D., Robertson J., and Milne W.I. J. Appl. Phys. 90 (2001) 5308
13. Merkulov V.I., Melechko A.V., Guillorn M.A., Lowndes D.H., and Simpson M.L. Chem. Phys. Lett. 350 (2001) 381
14. Morjan R.E., Maltsev V., Nerushev O.A., Yao Y., Falk L.K.L., and Campbell E.E.B. Chem. Phys. Lett. 383 (2004) 385
15. Ducati C., Alexandrou I., Chhowalla M., Robertson J., and Amaratunga G.A.J. J. Appl. Phys. 95 (2004) 6387
16. Hash D., Bose D., Govindan D.R., and Meyyappan M. J. Appl. Phys. 93 (2003) 6284
17. Teo K.B.K., Meyyappan M., Lacerda R.G., Rupesinghe N.L., Bell M.S., Dalal S.H., Bose D., Govindan T.R., Cruden B.A., Hash D., Chhowalla M., Amaratunga G.A.H., and Milne W.I. Nano Lett. 4 (2004) 921
18. Huang Z.P., Xu J.W., Ren Z.F., Wang J.H., Siegal M.P., and Provencio P.N. Appl. Phys. Lett. 73 (1998) 3845
19. Chen Y., Guo L., Patel S., and Shaw D.T. J. Mater. Sci. 35 (2000) 5517
20. Han J.H., Yang W.S., Yoo J.B., and Park C.Y. J. Appl. Phys. 88 (2000) 7363
21. Taschner Ch., Pacal F., Leonhardt A., Spatenka P., Bartsch K., Graff A., and Kaltofen R. Surf. Coat. Technol. 174 (2003) 81
22. Zhang Y., Chang A., Cao J., Wang Q., Kim W., Li Y., Morris N., Yenilmez E., Kong J., and Dai H. Appl. Phys. Lett. 79 (2001) 3155
23. Baker R.T.K. Carbon 27 (1989) 315
24. Cojocaru C.S., and Le Normand F. J. Nanosci. Nanotechnol. (2006)
25. Hsu W.L. J. Vac. Sci. Technol., A 6 (1988) 1803
26. F. Le Normand, C.S. Cojocaru, A. Senger, B. Vigolo, (in press).