Role of carbon atoms in plasma-enhanced chemical vapor deposition for carbon nanotubes synthesis

Thin Solid Films

Volumn 515, Issue 4, 2006, Pages 1314-1319

  Bratescu, M A ^a   Suda, Y ^b   Sakai, Y ^b   Saito, N ^c   Takai, O ^c  

^a n Factory Co Ltd   (Japan)

^b HOKKAIDO UNIVERSITY   (Japan)

^c NAGOYA UNIVERSITY   (Japan)

Author keywords

Carbon; Chemical vapor deposition (CVD); Clusters; Hydrocarbons; Methane; Nanostructure; Optical spectroscopy; Plasma processing and deposition

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEPOSITION; GRAPHITE; PLASMAS;

CLUSTERS; OPTICAL SPECTROSCOPY; RAMAN SPECTRUM; TRANSMISSION SPECTRUM;

CARBON NANOTUBES;

EID: 33750818435     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.03.022     Document Type: Article

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