The process window for diamond deposition from the vapor phase with sulfur in the C-H-O feed gas mixtures

Thin Solid Films

Volumn 440, Issue 1-2, 2003, Pages 78-86

  Bhimarasetti, Gopinath ^a   Sunkara, Mahendra K ^a  

^a University of Louisville   (United States)

Author keywords

Chemical vapor deposition; Diamond; Reaction kinetics; Sulfur

Indexed keywords

BINDING ENERGY; DIAMONDS; PHASE COMPOSITION; REACTION KINETICS; SUPERSATURATION; VAPOR PHASE EPITAXY;

FEED GAS MIXTURES;

THIN FILMS;

EID: 0041620677     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00837-X     Document Type: Article

References (19)

1. Gamo M.N., Yasu E., Xiao C., Kikuchi Y., Ushizawa K., Sakaguchi I., Suzuki T., Ando T. Diamond Relat. Mater. 9:2000;941.
2. Gheeraet E., Casanova N., Tajani A., Deneuville A., Bustarret E., Garrido J.A., Nebel C.E., Stutzmann M. Diamond Relat. Mater. 11:2002;289.
3. Petherbridge J.R., May P.W., Fuge G.M., Robertson G.F., Rosser K.N., Ashfold M.N.R. J. Appl. Phys. 91:2002;3605.
4. Eaton S.C., Anderson A.B., Angus J.C., Evstefeeva Y.E., Pleskov Y.V. Electrochem. Solid State Lett. 5:2002;G65.
5. Petherbridge J.R., May P.W., Ashfold M.N.R. J. Appl. Phys. 89:2001;5219.
6. Eaton S.C., Sunkara M.K. Diamond Relat. Mater. 9:2000;1320.
7. Eaton S.C., Sunkara M.K., Ueno M., Walsh K.M. Diamond Relat. Mater. 10:2001;2212.
8. Dandy D.S. Thin Solid films. 381:2001;1.
9. Sternschulte H., Schreck M., Stritzker B. Diamond Relat. Mater. 11:2002;296.
10. Petherbridge J.R., May P.W., Crichton E.J., Rosser K.N., Ashfold M.N.R. Phys. Chem. Chem. Phys. 4:2002;5199.
11. National Institute of Standards and Technology chemical kinetics database, Standard Reference Database 17, Version 7.0 (web version), http://kinetics.nist.gov.
12. R.S. Tsang, Ph.D. Thesis, Department of Chemistry, University of Bristol, United Kingdom, 1997.
13. Bachmann P.K., Leers D., Lydtin H. Diamond Relat. Mater. 1:1991;1.
14. P.K. Bachmann, H. J. Hagemann, H. Late, in: C.H. Carter Jr., G. Gildenblat, S. Nakamura, R. J. Nemanich (Eds.), Diamond SiC and Nitride Wide Bandgap Semiconductors, San Francisco, USA, April 4-8, 1994, Materials Research Society Symposium Proceeding 339 (1994) 267.
15. Prijaya N.A., Angus J.C., Bachmann P.K. Diamond Relat. Mater. 3/1-2:1994;129.
16. Zachariah M.R., Smith O.I. Combust. Flame. 69:1987;125.
17. Schofield K. Combust. Flame. 124:2001;137.
18. Tsuchiya K., Kamiya K., Matsui H. Int. J. Chem. Kinet. 29:1997;57.
19. Barber G.D., Yarbrough W.A. J. Am. Ceram. Soc. 80:1997;1560.