SCOPUS 정보 검색 플랫폼

Volumn 501, Issue 1-2, 2006, Pages 21-25

Hot wire radicals and reactions

Author keywords

Amorphous silicon; Chemical vapor deposition; Radicals; Solar cells

Indexed keywords

AMORPHOUS SILICON; DENSITY (SPECIFIC GRAVITY); FLUXES; IONIZATION; MASS SPECTROMETRY; MATHEMATICAL MODELS; SILANES; SOLAR CELLS;

HOT WIRE (HW) REACTOR; RADICAL FLUXES; RADICALS; SILICON-RELEASE;

CHEMICAL REACTORS;

EID: 32644435192 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.07.116 Document Type: Conference Paper

Times cited : (13)

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