An optical emission spectroscopy study of the plasma generated in the DC HF CVD nucleation of diamond

Applied Surface Science

Volumn 253, Issue 8, 2007, Pages 4051-4059

  Larijani, M M ^a   Le Normand, F ^b   Cregut O ^b  

^a ATOMIC ENERGY ORGANIZATION OF IRAN   (Iran)

^b INSTITUT DE PHYSIQUE ET CHIMIE DES MATÉRIAUX DE STRASBOURG   (France)

Author keywords

Diamond; HFCVD; Nucleation; Optical emission spectroscopy

Indexed keywords

DIAMONDS; NUCLEATION; OPTICAL SYSTEMS; PLASMAS; RAMAN SCATTERING; SCANNING ELECTRON MICROSCOPY;

DIAMOND NUCLEATION; NUCLEATION DENSITY; OPTICAL EMISSION SPECTROSCOPY;

EMISSION SPECTROSCOPY;

EID: 33846572313     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.09.004     Document Type: Article

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