Axial distribution of optical emission in a planar magnetron discharge

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 6, Issue 5, 1988, Pages 2960-2964

  Gu, Lan ^a   Lieberman, M A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84953676480     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.575460     Document Type: Article

References (7)

1. J. A. Thornton and A. S. Penfold, in Thin Film Processes, edited by J. L. Vossen and W. Kern (Academic, New York, 1978), p. 76.
2. R. K. Waits, in Ref. 1, p. 131.
3. J. A. Thornton, J. Vac. Sci. Technol. 15, 171 (1978).
4. S. M. Rossnagel and H. R. Kaufman, J. Vac. Sci. Technol. A 4, 1882 (1986).
5. H. Fujita, S. Yagura, H. Veno, and M. Nagano, J. Phys. D 19, 1699 (1986).
6. J. M. Rossnagel and H. R. Kaufman, J. Vac. Sci. Technol. A 5, 88 (1987).
7. A. E. Wendt, M. A. Lieberman, and H. Meuth, J. Vac. Sci. Technol. A6, 1827 (1988).