A thin chromium film formation monitoring method: Monitoring of the early stages

Thin Solid Films

Volumn 516, Issue 10, 2008, Pages 2943-2947

  Jukna, T ^a   Baltrusaitis J ^b   Sinkevicius V ^a   Virzonis D ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b E11 SSH   (United States)

Author keywords

Atomic force microscopy (AFM); Chromium; Electrical conductivity; In situ measurement; Vapor deposition; X ray photoelectron spectroscopy (XPS)

Indexed keywords

DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRONS; NUCLEATION; THIN FILMS;

IN-SITU MEASUREMENT; THIN FILM CONDUCTIVITY;

CHROMIUM;

EID: 39649120821     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.10.087     Document Type: Article

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