Comparative analysis of amorphous silicon and silicon nitride multilayer by spectroscopic ellipsometry and transmission electron microscopy

Thin Solid Films

Volumn 515, Issue 7-8, 2007, Pages 3559-3562

  Serenyi, M ^a   Lohner, T ^a   Petrik, P ^a   Frigeri, C ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b CNR   (Italy)

Author keywords

Amorphous material; Ellipsometry; Optical properties; Silicon nitride

Indexed keywords

AMORPHOUS SILICON; ELLIPSOMETRY; REFRACTIVE INDEX; SILICON NITRIDE; SILICON WAFERS; TRANSMISSION ELECTRON MICROSCOPY;

FREQUENCY SPUTTERING; MULTILAYER STACKS; SPECTROSCOPIC ELLIPSOMETRY; TAUC-LORENTZ OSCILLATOR MODEL;

MULTILAYERS;

EID: 33846965591     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.10.137     Document Type: Article

References (17)

1. Bovard B.G. Appl. Opt. 29 (1990) 24
2. Lowe A.J., Powell M.J., and Elliott S.R. J. Appl. Phys. 59 (1986) 1251
3. Park Y., and Jeon H.J. Lightwave Technol. 8 (2004) 1987
4. Volk J., Fried M., Polgár O., and Bársony I. Phys. Status Solidi, A Appl. Res. 197 (2003) 208
5. Szekeres A., Paneva A., and Alexandrova S. Thin Solid Films 343-344 (1999) 385
6. Fried M., Lohner T., Aarnink W.A., Hanekamp L.J., and van Silfhout A.J. J. Appl. Phys 71 (1992) 5260
7. Franta F., Ohlídal I., Frumar M., and Jedelský J. Appl. Surf. Sci. 175-176 (2001) 555
8. Strehlke S., Sarti D., Polgar O., Fried M., and Lévy-Clément D. Electrochem. Soc. Proc. Series 97-20 (1997) 278
9. Krotkus A., Grigoras K., Pacebutas V., Bársony I., Vázsonyi E., Fried M., Szlufcik J., Nijs J., and Levy-Clement C. Sol. Energy Mater. Sol. Cells 45 (1997) 267
10. Modreanu M., Gartner M., Cobianu C., O'Looney D., and Murphy F. Thin Solid Films 450 (2004) 105
11. Ross F.M., and Stobbs W.M. Philos. Mag. 63 (1991) 1
12. Wajtena G.L., Hren J., and Rez P. J. Appl. Phys. 73 (1993) 1750
13. Beanland R. Inst. Phys. Conf. Ser. 164 (1999) 451
14. Serényi M., and Frigeri C. Eur. Phys. J. Appl. Phys. 27 (2004) 329
15. Jellison G.E., and Modine F.A. Appl. Phys. Lett. 69 (1996) 371
16. Edwards D.F. In: Palik E.D. (Ed). Handbook of Optical Constants of Solids (1985), Academic Press, New York 547
17. Piller H. In: Palik E.D. (Ed). Handbook of Optical Constants of Solids (1985), Academic Press, New York 571