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Volumn 48, Issue 3, 2008, Pages 370-381

Conduction mechanisms of silicon oxide/titanium oxide MOS stack structures

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; GATE DIELECTRICS; MOSFET DEVICES; SILICON COMPOUNDS; THIN FILMS; TITANIUM COMPOUNDS;

EID: 39449119505     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2007.06.005     Document Type: Article
Times cited : (24)

References (16)
  • 1
    • 33746862976 scopus 로고    scopus 로고
    • On the scaling issues and high-k replacement of ultrathin gate dielectrics for nanoscale MOS transistors
    • Wong H., and Iwai H. On the scaling issues and high-k replacement of ultrathin gate dielectrics for nanoscale MOS transistors. Microelectron Eng 83 (2006) 1904-1987
    • (2006) Microelectron Eng , vol.83 , pp. 1904-1987
    • Wong, H.1    Iwai, H.2
  • 2
    • 0036540241 scopus 로고    scopus 로고
    • Silicon integrated circuit technology from past to future
    • Iwai H., and Ohmi S.I. Silicon integrated circuit technology from past to future. Microelectron Reliab 42 (2002) 465-491
    • (2002) Microelectron Reliab , vol.42 , pp. 465-491
    • Iwai, H.1    Ohmi, S.I.2
  • 3
    • 0035872897 scopus 로고    scopus 로고
    • High-k gate dielectrics: current status and materials properties considerations
    • Wilk G.D., Wallace R.M., and Anthony J.M. High-k gate dielectrics: current status and materials properties considerations. J Appl Phys 89 (2001) 5243-5275
    • (2001) J Appl Phys , vol.89 , pp. 5243-5275
    • Wilk, G.D.1    Wallace, R.M.2    Anthony, J.M.3
  • 4
    • 0030291621 scopus 로고    scopus 로고
    • Thermodynamic stability of binary oxides in contact with silicon
    • Hubbard K.J., and Schlom D.G. Thermodynamic stability of binary oxides in contact with silicon. J Mater Res 11 (1996) 2757-2776
    • (1996) J Mater Res , vol.11 , pp. 2757-2776
    • Hubbard, K.J.1    Schlom, D.G.2
  • 6
    • 0034291090 scopus 로고    scopus 로고
    • 2 interfaces for advanced silicon NMOS and PMOS devices: applications to Si-oxide/Si oxynitride, Si-oxide/Si-nitride and Si-oxide/transition metal oxide stacked gate dielectrics
    • 2 interfaces for advanced silicon NMOS and PMOS devices: applications to Si-oxide/Si oxynitride, Si-oxide/Si-nitride and Si-oxide/transition metal oxide stacked gate dielectrics. Thin Solid Films 374 (2000) 217-227
    • (2000) Thin Solid Films , vol.374 , pp. 217-227
    • Lucovsky, G.1    Yang, H.2    Wu, Y.3    Niimi, H.4
  • 10
    • 0038527305 scopus 로고    scopus 로고
    • Room temperature plasma oxidation mechanism to obtain ultrathin silicon oxide and titanium oxide layers
    • Tinoco J.C., Estrada M., and Romero G. Room temperature plasma oxidation mechanism to obtain ultrathin silicon oxide and titanium oxide layers. Microelectron Reliab 43 (2003) 895-903
    • (2003) Microelectron Reliab , vol.43 , pp. 895-903
    • Tinoco, J.C.1    Estrada, M.2    Romero, G.3
  • 11
    • 28044447444 scopus 로고    scopus 로고
    • Room temperature plasma oxidation: a new process for preparation of ultrathin layers of silicon oxide, and high dielectric constant materials
    • Tinoco J.C., Estrada M., Baez H., and Cerdeira A. Room temperature plasma oxidation: a new process for preparation of ultrathin layers of silicon oxide, and high dielectric constant materials. Thin Solid Films 496 (2006) 546-554
    • (2006) Thin Solid Films , vol.496 , pp. 546-554
    • Tinoco, J.C.1    Estrada, M.2    Baez, H.3    Cerdeira, A.4
  • 13
    • 28444478317 scopus 로고    scopus 로고
    • 2 dielectric stack made by room temperature plasma oxidation. In: Proceedings of the fifth international caracas conference on devices, circuits and systems IEEE-ICCDCS-2004.
    • 2 dielectric stack made by room temperature plasma oxidation. In: Proceedings of the fifth international caracas conference on devices, circuits and systems IEEE-ICCDCS-2004.
  • 16
    • 0037042017 scopus 로고    scopus 로고
    • Band structures and band offsets of high k dielectrics on Si
    • Roberton J. Band structures and band offsets of high k dielectrics on Si. Appl Surf Sci 190 (2002) 2-10
    • (2002) Appl Surf Sci , vol.190 , pp. 2-10
    • Roberton, J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.