Enhanced green laser activation by antireflective gate structures in panel transistors

Applied Physics Letters

Volumn 92, Issue 6, 2008, Pages

  Shieh, Jia Min ^a,b   Chen, Chih ^b   Lin, Yu Ting ^b   Pan, Ci Ling ^b  

^a NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRON MOBILITY; GATE DIELECTRICS; LASER EXCITATION; MICROSTRUCTURE; POLYSILICON; SILICA;

ANTIREFLECTIVE GATE STRUCTURES; GREEN LASER ACTIVATION; LASER ACTIVATION; LASER ANNEALING; PANEL TRANSISTORS;

THIN FILM TRANSISTORS;

EID: 39349098952     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2842417     Document Type: Article

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