Junction defects of self-aligned, excimer-laser-annealed poly-Si TFTs

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2002, Pages 573-576

  Park, K C ^a   Jung, S H ^a   Lee, M C ^a   Kang, S H ^a   Moon, K C ^a   Han, M K ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPUTER SIMULATION; HEAT LOSSES; ION IMPLANTATION; LASER BEAM EFFECTS; LEAKAGE CURRENTS; LIQUID CRYSTAL DISPLAYS; POLYSILICON; THERMAL CONDUCTIVITY; TRANSMISSION ELECTRON MICROSCOPY;

SHORT CHANNEL DEVICES;

THIN FILM TRANSISTORS;

EID: 0036924001     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. M. Kimura, I. Yudasaka, S. Kanbe, H. Kobayashi, H. Kiguchi, S. Seki, S. Miyashita, T. Shimoda, T. Ozawa, K. Kitawada, T. Nakazawa, W. Miyazawa, and H. Ohshima, "Low-temperature polysilicon thin-film transistor driving with integrated driver for high-resolution light emitting polymer display," IEEE Trans. Elec. Dev., vol. 46, no. 12, pp. 2282-2289, December 1999.
2. F.W. Rohlfing, J.R. Ayres, S.D. Brotherton, C.A. Fisher, and D.J. McCulloch, "Fabrication and characterization of poly-Si TFTs with self-aligned lightly-doped drain," Conf. Rec. 20th Int'l Display Res. Conf., pp. 119-122, September 2000.
3. D.Z. Peng, T.C. Chang, H.W. Zan, T.Y. Huang, C.Y. Chang, and P.T. Liu, "Reliability of laser-activated low-temperature polycrystalline silicon thin-film transistors," Appl. Phys. Lett., vol. 80, no. 25, pp. 4780-4785, June 2002.
4. A. Marmorstein, A.T. Voutsas, R. Solanki, "A systematic study and optimization of parameters affecting grain size and surface roughness in excimer laser annealed polysilicon thin films," J. Appl. Phys., vol. 82, no. 9, pp. 4303-4310, November 1997.
5. th Asian Symp. Inform. Display, pp. 77-80, September 2002.