Computational studies of plasma generation and control in a magnetron sputtering system

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 7 B, 1999, Pages 4450-4454

  Ido, Shunji ^a   Kashiwagi, Mieko ^a   Takahashi, Mikihiko ^a  

^a SAITAMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS; FERROMAGNETIC MATERIALS; FINITE ELEMENT METHOD; MAGNETIC FIELDS; MATHEMATICAL MODELS; PERMANENT MAGNETS; PLASMA THEORY;

FERROMAGNETIC TARGET; PLASMA GENERATION; SOFT IRON;

MAGNETRON SPUTTERING;

EID: 0033157624     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.4450     Document Type: Article

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