Thermal stability of amorphous carbon films grown by pulsed laser deposition

Applied Physics Letters

Volumn 68, Issue 12, 1996, Pages 1643-1645

  Friedmann, T A ^a   McCarty, K F ^b   Barbour, J C ^a   Siegal, M P ^a   Dibble, Dean C ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CARBON; EXCIMER LASERS; GASES; LASER PULSES; PULSED LASER APPLICATIONS; RAMAN SPECTROSCOPY; SILICON; THERMAL EFFECTS; THERMODYNAMIC STABILITY; TRANSPARENCY; VACUUM;

AMORPHOUS CARBON; ION SCATTERING; LASER FLUENCES; PULSED LASER DEPOSITION;

AMORPHOUS FILMS;

EID: 0030110155     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115891     Document Type: Article

References (14)

1. D. R. McKenzie, D. Muller, B. A. Pailthorpe, Z. H. Wang, E. Kravtchinskaia, D. Segal, P. B. Lukins, P. D. Swift, P. J. Martin, G. Amaratunga, P. H. Gaskell, and A. Saeed, Diam. Relat. Mater. 1, 51 (1991).
2. C. B. Collins, F. Davanloo, E. M. Juengerman, W. R. Osborn, and D. R. Jander, Appl. Phys. Lett. 54, 216 (1988).
3. T. A. Friedmann, M. P. Siegal, D. R. Tallant, R. L. Simpson, and F. Dominguez, in Novel Forms of Carbon II, edited by C. L. Renschler, D. Cox, J. Pouch, and Y. Achiba (Materials Research Society, Pittsburgh, 1994), Vol. 349.
4. Y. Lifshitz, S. R. Kasi, and J. W. Rabalais, Phys. Rev. Lett. 62, 1290 (1989).
5. E. G. Spencer, P. H. Schmidt, D. C. Joy, and F. J. Sansalone, Appl. Phys. Lett. 29, 118 (1976).
6. J. J. Cuomo, D. L. Pappas, J. Bruley, J. P. Doyle, and K. L. Saenger, J. Appl. Phys. 70, 1706 (1991).
7. D. R. Tallant, J. E. Parmeter, M. P. Siegal, and R. L. Simpson, Diam. Relat. Mater. 4, 191 (1995).
8. R. A. Causey, W. R. Wampler, and D. Walsh, J. Nucl. Mater. 176/177, 987 (1990).
9. R. L. Wu, K. Miyoshi, R. Vuppuladhadium, and H. E. Jackson, Surf. Coat. Technol. 54/55, 576 (1992).
10. F. Xiong, Y. Y. Wang, and R. P. H. Chang, Phys. Rev. B 48, 8016 (1993).
11. J. Wagner, C. Wild, and P. Koidl, Appl. Phys. Lett. 59, 779 (1991).
12. D. Thebert-Peeler, P. T. Murray, L. Petry, and T. W. Haas, in Phase Formation and Modification by Beam-Solid Interactions, edited by G. S. Was, L. E. Rehn, and D. M. Follstaedt (Materials Research Society, Pittsburgh, 1992), Vol. 235, p. 879.
13. D. R. McKenzie, D. Muller, and B. A. Pailthorpe, Phys. Rev. Lett. 67, 773 (1991).
14. F. Tuinstra and J. L. Koenig, J. Chem. Phys. 53, 1126 (1969).