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Volumn 5, Issue 3, 1995, Pages 209-218

Inhibition of pyramid formation in the etching of Si p(100) in aqueous potassium hydroxide-isopropanol

Author keywords

[No Author keywords available]

Indexed keywords

ALKALINE SOLUTIONS; AQUEOUS POTASSIUM HYDROXIDE-ISOPROPANOL; CHEMICAL REAGENTS PURITY; DISSOLVED GASES; HYDROGEN BUBBLE FORMATION; MICROPYRAMIDS; PITS;

EID: 0029373771     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/5/3/002     Document Type: Article
Times cited : (111)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.