Low-temperature fabrication and characterization of Ge-on-insulator structures

Applied Physics Letters

Volumn 89, Issue 10, 2006, Pages

  Yu, C Y ^c   Lee, C Y ^c   Lin, C H ^c   Liu, C W ^a,b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; HYDROGEN; ION IMPLANTATION; PASSIVATION; PHOTOCURRENTS; SURFACE ROUGHNESS; TUNNEL DIODES;

GE-ON-INSULATOR STRUCTURES; LAYER TRANSFER TECHNIQUES; ULTRALOW BONDING TEMPERATURES; WAFER BONDING;

GERMANIUM;

EID: 33748496047     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2347116     Document Type: Article

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