Measurement of the mechanical properties of carbon nitride thin films from the nanoindentation loading curve

Diamond and Related Materials

Volumn 13, Issue 4-8, 2004, Pages 1543-1548

  Chowdhury, S ^a   Laugier, M T ^a   Rahman, I Z ^a  

^a UNIVERSITY OF LIMERICK   (Ireland)

Author keywords

Atomic force microscopy; Carbon nitride; Mechanical properties; Nanoindentation

Indexed keywords

ELASTIC MODULI; ELASTICITY; HARDNESS; MAGNETRON SPUTTERING; STRUCTURAL LOADS; THIN FILMS;

LOADING CURVES; NANOHARDNESS TESTER; NANOINDENTATION;

CARBON NITRIDE;

DIAMOND;

EID: 2442623267     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2003.11.063     Document Type: Article

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