Atomic rearrangement of sputtered amorphous carbon nitride thin films during growth

Diamond and Related Materials

Volumn 13, Issue 10, 2004, Pages 1854-1858

  Durand Drouhin, O ^a   Benlahsen, M ^a   Clin, M ^a   Zellama, K ^a  

^a Pôle Scientifique   (France)

Author keywords

Mechanical properties; Points defects; Thin films

Indexed keywords

AMORPHOUS MATERIALS; BONDING; CRYSTAL ATOMIC STRUCTURE; FILM GROWTH; MAGNETRON SPUTTERING; MICROSTRUCTURE; NATURAL FREQUENCIES; POINT DEFECTS; RAMAN SPECTROSCOPY; REFRACTIVE INDEX; SILICON WAFERS; THIN FILMS;

ATOMIC REARRANGEMENT; ELASTIC RECOIL DETECTION ANALYSIS (ERDA); NUCLEAR REACTION ANALYSIS (NRA); RADIO FREQUENCY (RF) MAGNETRON SPUTTERING;

CARBON NITRIDE;

EID: 9744250308     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.05.005     Document Type: Article

References (24)

1. L. Hultman, J. Neidhardt, N. Hellgren, H. Sjöström, J.-E. Sundgren, Mater. Res. Soc. Bull. (2003 March) 194.
2. A.A. Voevodin, J.G. Jones, J. Zabinski, Zs. Czigány, L. Hultman, J. Appl. Phys. 92 (2002) 724.
3. N.A. Morrisson, S.E. Rodil, J. Robertson, W.I. Milne, J. Appl. Phys. 89 (2001) 5754.
4. N. Hellgren, K. Macák, E. Broitman, M.P. Johansson, L. Hultman, J.-E. Sundgren, J. Appl. Phys. 88 (1) (2000) 524.
5. A.C. Ferrari, S.E. Rodil, J. Robertson, Phys. Rev., B 67 (2003) 155306.
6. J.H. Kaufman, S. Metin, D.D. Saperstein, Phys. Rev., B 39 (1989) 13053.
7. J. Hu, P. Yang, C.M. Leiber, Phys. Rev., B. 57 (6) (1998) R3185.
8. G. Messina, A. Paoletti, S. Santangelo, A. Tagliaferro, A. Tucciarone, J. Appl. Phys. 89 (2001) 1053.
9. D. Papadimitriou, G. Roupakas, C.A. Dimitriadis, S. Longothetidis, J. Appl. Phys. 92 (2002) 870.
10. J.S. Bhattacharyya, C. Cardinaud, G. Turban, J. Appl. Phys. 83 (1998) 4491.
11. A.C. Ferrari, J. Robertson, Phys. Rev., B. 61 (2000) 14095.
12. O. Durand-Drouhin, PhD thesis, University of Picardie Jules Verne, June 28th, Amiens (2001).
13. O. Durand-Drouhin, M. Lejeune, M. Clin, D. Ballutaud, M. Benlahsen, Solid State Commun. 118 (2001) 179.
14. M. Lejeune, O. Durand-Drouhin, K. Zellama, M. Benlahsen, Solid State Commun. 120 (2001) 337.
15. J. Taue, in: F. Abeles (Ed.), Optical Properties of Solids, North Holland, Amsterdam, 1972, p. 277.
16. C. Quiros, P. Pricto, E. Elizalde, R. Perez-Casero, V. Gomez, P. Herreri, J.M. Sanz, Surf. Coat. Technol. 125 (2000) 278.
17. P. Hammer, N.M. Victoria, F. Alvarez, J. Vac. Sci. Technol., A, Vac. Surf. Films 16 (1998) 2941.
18. R. Wixom, J. Am. Ceram. Soc. 73 (1990) 1973.
19. O. Durand-Drouhin, M. Lejeune, M. Benlahsen, J. Appl. Phys. 91 (2) (2002) 867.
20. M.L. Thèye, V. Paret, Carbon 40 (2002) 1153.
21. M. Lejeune, O. Durand-Drouhin, J. Henocque, R. Bouzerar, A. Zeinert, M. Benlahsen, Thin Solid Films 389 (2001) 233.
22. V. Paret, A. Sadki, Y. Bounouh, R. Almaeh, C. Naud, M. Zarrabian, A. Seignac, G. Turban, M.L. Thèye, J. Non-Cryst. Solids 227-230 (1998) 583.
23. H. Windischman, Crit. Rev. Solid State Mater. Sci. 17 (1992) 547.
24. D.S. Campbell, in: L.I. Maissel, R. Glang (Eds.), Handbook of Thin Films Technology, McGraw-Hill, New York, 1970, p. 12.