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Physica Status Solidi (A) Applied Research

Volumn 193, Issue 3, 2002, Pages 482-488

Deposition of aluminium nitride film by magnetron sputtering for diamond-based surface acoustic wave applications

(8) Mortet, V a Nesladek, M a D'Haen, J a Vanhoyland, G a Elmazria, O b Assouar, M B b Alnot, P b D'Olieslaeger, M a

a HASSELT UNIVERSITY (Belgium)

b INSTITUT JEAN LAMOUR (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; ALUMINUM NITRIDE; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; FILM GROWTH; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SURFACE WAVES; TEXTURES; X RAY DIFFRACTION ANALYSIS;

SURFACE ACOUSTIC WAVES (SAW);

THIN FILMS;

EID: 0036809679 PISSN: 00318965 EISSN: None Source Type: Journal
DOI: 10.1002/1521-396X(200210)193:3<482::AID-PSSA482>3.0.CO;2-D Document Type: Conference Paper

Times cited : (28)

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