Investigations on temperature controlled monolithic integrated surface acoustic wave (SAW) gas sensors

Sensors and Actuators, B: Chemical

Volumn 93, Issue 1-3, 2003, Pages 164-168

  Bender, S ^a   Dickert, F L ^b   Mokwa, W ^a   Pachatz, P ^b  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b UNIVERSITY OF VIENNA   (Austria)

Author keywords

AlN thin films; Gas sensor; Mass sensitive polymers; Surface acoustic waves; Temperature effects

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ADSORPTION; ALUMINUM NITRIDE; BENZENE; PIEZOELECTRIC MATERIALS; POLYURETHANES; THIN FILMS; XYLENE;

SURFACE ACOUSTIC WAVE (SAW) GAS SENSORS;

CHEMICAL SENSORS;

EID: 0038110919     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00194-1     Document Type: Conference Paper

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