Structural properties and frequency response of AlN thin film surface acoustic wave device

5th Korea-Russia International Symposium on Science and Technology - Proceedings: KORUS 2001

Volumn 1, Issue , 2001, Pages 206-209

  Nam, Chang Woo ^a   Lee, Kyu Chul ^a  

^a University of Ulsan   (South Korea)

Author keywords

A1N thin film; RF sputter; SAW

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTIC WAVE VELOCITY; ACOUSTIC WAVES; FREQUENCY RESPONSE; INSERTION LOSSES; SAPPHIRE; SAWING; SILICON WAFERS; ULTRASONIC TRANSDUCERS;

ALN THIN FILMS; CENTER FREQUENCY; COLUMNAR STRUCTURES; CROSS-SECTIONAL SEM; ELECTRICAL CHARACTERISTIC; INTERDIGITAL TRANSDUCER; OPERATING CONDITION; REACTIVE MAGNETRON SPUTTERING METHOD;

THIN FILMS;

EID: 84961839739     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/KORUS.2001.975101     Document Type: Conference Paper

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