High velocity SAW using aluminum nitride film on unpolished nucleation side of freestanding CVD diamond

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2002, Pages 139-142

  Elmazria, O ^a   Mortet, V ^b   El Hakiki, M ^a   Assouar, M B ^a   Nesladek, M ^b   Alnot, P ^a  

^a INSTITUT JEAN LAMOUR   (France)

^b HASSELT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE VELOCITY; ALUMINUM NITRIDE; CHEMICAL VAPOR DEPOSITION; COUPLINGS; DIAMOND FILMS; ETCHING; GREEN'S FUNCTION; NUCLEATION; POLYCRYSTALLINE MATERIALS; RAYLEIGH SCATTERING; SEMICONDUCTING SILICON; THICKNESS MEASUREMENT;

ELECTROMECHANICAL COUPLING COEFFICIENT; FOUR POINTS PROBE METHOD;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 0036992215     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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2. V. Mortet, M. Nesladek, G. Vanhoyland, J. D'Haen, O. Elmazria, M.B. Assouar, and P. Alnot, "Deposition of aluminium nitride film by magnetron sputtering for diamond-based surface acoustic wave applications" To be published in Physica Status Solidi.
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