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Journal of Applied Physics

Volumn 59, Issue 6, 1986, Pages 1890-1903

Ion bombardment energy distributions in radio-frequency glow-discharge systems

(4) Thompson, Brian E a Allen, Kenneth D a Richards, Albert D a Sawin, Herbert H a

a MASSACHUSETTS INSTITUTE OF TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36549100753 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.336417 Document Type: Article

Times cited : (106)

References (24)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.