Observation of fast hydrogen atoms formed by ion bombarding of surfaces

Contributions to Plasma Physics

Volumn 42, Issue 6-7, 2002, Pages 596-602

  Gans, T ^a   Schulz von der Gathen, V ^a   Czarnetzki, U ^a   Dobele H F ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; ELECTRODES; HYDROGEN; ION BOMBARDMENT;

ATOMIC HYDROGEN; B-Y IONS; CAPACITIVELY COUPLED; CHARACTERISTIC EMISSION; EMISSION LINES; HYDROGEN ATOMS; MOLECULAR HYDROGEN; OPTICAL-EMISSION SPECTROSCOPY; PLASMA BULK; RF REACTOR;

OPTICAL EMISSION SPECTROSCOPY;

EID: 0036445958     PISSN: 08631042     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3986(200211)42:6/7<596::AID-CTPP596>3.0.CO;2-Z     Document Type: Conference Paper

References (8)

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8. U. Czarnetzki, D. Luggenhölscher, H.F. Döbele, Appl. Phys. A (2001) accepted for publication.