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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 11, 2007, Pages 7194-7197

Evolution of one-dimensional gratings with high aspect ratios on Si(001) surfaces by high-temperature annealing

(3) Nakamura, Jun a Sudoh, Koichi a Iwasaki, Hiroshi a

a OSAKA UNIVERSITY (Japan)

Author keywords

Annealing; Microstructure; Silicon; Surface diffusion; Transformation

Indexed keywords

ANNEALING; ASPECT RATIO; COMPUTER SIMULATION; MASS TRANSFER; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SILICON; SURFACE DIFFUSION; SURFACE STRUCTURE; ULTRAHIGH VACUUM;

EXPONENTIAL AMPLITUDE DECAY; MULLINS' THEORY; STRUCTURAL EVOLUTION;

SURFACE ANALYSIS;

EID: 35948941982 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.46.7194 Document Type: Article

Times cited : (10)

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