Flattening of micro-structured Si surfaces by hydrogen annealing

Applied Surface Science

Volumn 252, Issue 15, 2006, Pages 5279-5283

  Hiruta, Reiko ^a   Kuribayashi, Hitoshi ^a   Shimizu, Ryosuke ^a   Sudoh, Koichi ^b   Iwasaki, Hiroshi ^b  

^a FUJI ELECTRIC CO   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

Flattening; Hydrogen annealing; Microstructure; Silicon

Indexed keywords

ANNEALING; DEFORMATION; HYDROGEN; HYDROGENATION; MICROSTRIP ANTENNAS; SUBSTRATES; THERMAL EFFECTS;

FLATTENING; HYDROGEN ANNEALING; SIDEWALL MORPHOLOGY; THERMAL DEFORMATION;

SILICON;

EID: 33744530881     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.12.051     Document Type: Article

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