Semi-quantitative chemical analysis of hard coatings by Raman micro-spectroscopy: The aluminium chromium nitride system as an example

Analytical and Bioanalytical Chemistry

Volumn 389, Issue 5, 2007, Pages 1569-1576

  Kaindl, R ^a   Sartory, B ^a   Neidhardt, J ^b   Franz, R ^b   Reiter, A ^c   Polcik, P ^d   Tessadri, R ^a   Mitterer, C ^b  

^a UNIVERSITY OF INNSBRUCK   (Austria)

^b UNIVERSITY OF LEOBEN   (Austria)

^c Balzers AG   (Liechtenstein)

^d PLANSEE COMPOSITE MATERIALS GMBH   (Germany)

Author keywords

Chemometrics statistics; Electron ion microprobe; Inorganic compounds trace inorganic compounds; Instrumentation; IR spectroscopy Raman spectroscopy; Metals heavy metals; Thin films

Indexed keywords

HEAVY METALS; INFRARED SPECTROSCOPY; INORGANIC COMPOUNDS; NITRIDES; RAMAN SPECTROSCOPY;

ION MICROPROBE; TRACE INORGANIC COMPOUNDS;

INORGANIC COATINGS;

EID: 35648963634     PISSN: 16182642     EISSN: 16182650     Source Type: Journal    
DOI: 10.1007/s00216-007-1540-4     Document Type: Article

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