Raman piezo-spectroscopic behavior of aluminum nitride

Applied Spectroscopy

Volumn 51, Issue 11, 1997, Pages 1761-1765

  Muraki, Naoki ^a   Sergo, Valter ^b   Pezzotti, Giuseppe ^c   Katagiri, Gen ^a   Meriani, Sergio ^b   Nishida, Toshihiko ^c  

^a TORAY RESEARCH CENTER INC   (Japan)

^b UNIVERSITY OF TRIESTE   (Italy)

^c KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Aluminum nitride; Piezo spectroscopy; Stress, indentations

Indexed keywords

CRACKS; NITRIDES; RESIDUAL STRESSES; STRESS CONCENTRATION;

ALUMINUM NITRIDE; RAMAN PIEZO SPECTROSCOPY;

RAMAN SPECTROSCOPY;

EID: 0031272815     PISSN: 00037028     EISSN: None     Source Type: Journal    
DOI: 10.1366/0003702971939497     Document Type: Article

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