Microhardness and lattice parameter of Cr1-xAlxN films

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 2, 2002, Pages 569-571

  Kawate, Masahiro ^a   Kimura, Ayako ^a   Suzuki, Tetsuya ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM ALLOYS; CRYSTAL MICROSTRUCTURE; ENERGY DISPERSIVE SPECTROSCOPY; LATTICE CONSTANTS; MICROHARDNESS; PLASMA ETCHING; SCANNING ELECTRON MICROSCOPY; SUBSTITUTION REACTIONS; VICKERS HARDNESS TESTING; X RAY DIFFRACTION ANALYSIS;

ARC ION PLATING (AIP);

METALLIC FILMS;

EID: 0036494572     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1448510     Document Type: Article

References (8)