Physical matching vs CD matching for CD SEM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6518, Issue PART 1, 2007, Pages

  Kris, Roman ^a   Zuckerman, Galit ^a   Sommer, Elad ^a   Hadad, Zion ^a   Dror, Shalev ^a   Tam, Aviram ^a   Shcolnik, Naftali ^a  

^a Applied Materials Inc Israel   (Israel)

Author keywords

CD; CD SEM; Fleet matching; FMP; SEM metrology; TMP; Tool matching

Indexed keywords

FEATURE EXTRACTION; PARAMETER ESTIMATION; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS; STATISTICAL METHODS;

FLEET MATCHING_KWD CD; PRODUCTION ENVIRONMENT; STATISTICAL TREATMENT; TOOL MATCHING;

PATTERN MATCHING;

EID: 35148849657     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.711768     Document Type: Conference Paper

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