Technique to automatically measure electron-beam diameter and astigmatism: BEAMETR

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 2956-2959

  Babin, S ^a   Gaevski, M ^b   Joy, D ^c,d   MacHin, M ^a   Martynov, A ^a  

^a ABEAM TECHNOLOGIES   (United States)

^b UNIVERSITY OF SOUTH CAROLINA   (United States)

^c UNIVERSITY OF TENNESSEE   (United States)

^d OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SOFTWARE; IMAGE PROCESSING; LASER TUNING; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY;

BEAM SIZE; SOFTWARE PROGRAMS; TEST PATTERNS;

ELECTRON BEAM LITHOGRAPHY;

EID: 33845275827     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2387158     Document Type: Article

References (6)

1. D. C. Joy, Y.-U. Ko, and J. J. Hwu, Proc. SPIE 3998, 108 (1999).
2. N. F. Zhang, M. T. Postek, R. D. Larrabee, A. E. Vladar, W. J. Keery, and S. N. Jones, Scanning 21, 246 (1999).
3. J. Kima, K. Jalhadia, S. Deoa, S.-Y. Lee, and D. Joy, Proc. SPIE (to be published).
4. J. A. Liddle, P. Naulleau, and G. Schmidt, J. Vac. Sci. Technol. B 22, 2897 (2004).
5. Handbook of Digital Signal Processing: Engineering Applications, edited by, D. F. Elliot, (Academic, San Diego, 1987).
6. S. Babin, S. Borisov, E. Cheremukhin, E. Grachev, V. Korol, and L. Ocola, Proc. SPIE 5037, 583 (2003).