Metrology tool fleet management: A comprehensive discussion of requirements and solutions

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6152 I, Issue , 2006, Pages

  Solecky, Eric ^a  

^a IBM   (United States)

Author keywords

Accuracy; Fleet management; Matching; Portability; Recipe management

Indexed keywords

ACCURACY; FLEET MANAGEMENT; MATCHING; PORTABILITY; RECIPE MANAGEMENT;

MEASUREMENT THEORY; PROBLEM SOLVING; PRODUCT DEVELOPMENT; PRODUCTIVITY;

FLEET OPERATIONS;

EID: 33745629316     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.659589     Document Type: Conference Paper

References (16)

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