Image quality monitoring for enhanced precision and tool matching of CD measuring tools

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5375, Issue PART 2, 2004, Pages 1346-1355

  Pnueli, Ayelet ^a   Karabekov, Albert ^a   Eytan, Guy ^a  

^a Applied Materials Inc Israel   (Israel)

Author keywords

Contrast to noise ratio (CNR); Critical dimension (CD) metrology; Resolution; Signal to noise ratio (SNR); Tool matching

Indexed keywords

CONTRAST TO NOISE RATIO (CNR); CRITICAL DIMENSION (CD) METROLOGY; IMAGE QUALITY UTILITY (IQU); TOOL MATCHING;

ALGORITHMS; IMAGE PROCESSING; MONITORING; PARAMETER ESTIMATION; PRECISION BALANCES; SCANNING ELECTRON MICROSCOPY; SIGNAL TO NOISE RATIO;

IMAGE QUALITY;

EID: 4344573760     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.556574     Document Type: Conference Paper

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