New comprehensive metrics and methodology for metrology tool fleet matching

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5752, Issue I, 2005, Pages 248-258

  Solecky, Eric ^a   Archie, Chas ^a   Banke, Bill ^b  

^a IBM MICROELECTRONICS   (United States)

^b IBM   (United States)

Author keywords

BMS; CD SEM; FMP; Matching; PSA; TMP; TuT

Indexed keywords

BMS; CD SEM; FMP; MATCHING; PSA; TMP; TUT;

BENCHMARKING; COMPUTER SIMULATION; DATA REDUCTION; SCANNING ELECTRON MICROSCOPY; SPECIFICATIONS;

MEASUREMENT THEORY;

EID: 24644519385     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.602330     Document Type: Conference Paper

References (5)

1. "The estimation of total measurement uncertainty in a multiple metrology tool environment", Justin J. Hwu, Thao J. Pham, Sukhbir Dulay, Andrew Lopez, Peter Wilkens, Proc. SPIE Vol. 5375. p. 413-425, Metrology, Inspection, and Process Control for Microlithography XVIII; Richard M. Silver; Ed., May 2004
2. "Multiple CD-SEM matching for 0.18-μm lines/spaces at different exposure conditions", Andre Engelen, Ingrid Minnaert-Janssen, Proc. SPIE Vol. 3677, p. 280-290, Metrology, Inspection, and Process Control for Microlithography XIII; Bhanwar Singh; Ed. June 1999
3. SEMATECH DOC ID #: 04014489A-TR "Title: Unified Advanced Critical Dimension Scanning Electron Microscope (CD-SEM) Specification for Sub-130 nm Technology (2002 Version)", http://www.sematech.org/docubase/abstracts/ 4489atr.htm
4. "Characteristics of Accuracy for CD Metrology", G. W. Banke, Jr., Charles N. Archie, Proc. SPIE Vol. 3677, p. 291-308, Metrology, Inspection, and Process Control for Microlithography XIII; Bhanwar Singh; Ed. June 1999
5. "Characterizing and understanding stray tilt: the next major contributor to CD SEM tool matching", Eric P. Solecky, Charles N. Archie, Jason Mayer, Roger S. Cornell, Ofer Adan, Proc. SPIE Vol. 5038, p. 518-527, Metrology, Inspection, and Process Control for Microlithography XVII; Daniel J. Herr; Ed., June 2003