Tools to measure CD-SEM performance

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6152 I, Issue , 2006, Pages

  Kim, Jihoon ^a   Jalhadi, Kiran ^a   Deo, Sachin ^a   Lee, Soo Young ^c   Joy, David ^a,b  

^a UNIVERSITY OF TENNESSEE   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c AUBURN UNIVERSITY   (United States)

Author keywords

Proximity correction; Resolution; Scanning electron microscope; Signal to noise; Zone plate

Indexed keywords

PROXIMITY CORRECTION; RESOLUTION; SIGNAL TO NOISE; ZONE PLATES;

COMPUTER SOFTWARE; ELECTRON BEAM LITHOGRAPHY; FOURIER TRANSFORMS; IMAGE ANALYSIS; JAVA PROGRAMMING LANGUAGE; MAINTENANCE; ONLINE SEARCHING; PERFORMANCE; SCANNING ELECTRON MICROSCOPY; SPECIFICATIONS;

IMAGING TECHNIQUES;

EID: 33745584333     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.650649     Document Type: Conference Paper

References (12)

1. DC Joy, Y-U Ko, and J J Hwu (2000), "Metrics of Resolution and Performance for CD-SEMS", in Metrology, Inspection, and Process Control XIV (ed. N Sullivan), Proc. SPIE 3998, 108-114
2. D C Joy, (2002), "SMART - a program to measure SEM resolution and imaging performance", J. of Microscopy, 208, 24-34
3. NIH IMAGE can be downloaded from http://rsb.info.nih/nih-image
4. SCION IMAGE is an authorized port of NIH IMAGE for Windows and can be downloaded from http://www.scioncorp.com
5. D C Joy, C S Joy, and R D Bunn, (1996), "Measuring the performance of Scanning Electron Microscope detectors", SCANNING 18, 533-538
6. IMAGE JAVA can be downloaded from http://rsb.info.nih.gov/ij
7. A Mauly, G L Farrent (2000), " A contribution to the evaluation of the resolution of the SEM', Proc. SPIE 3998, 108-114
8. M Sato and J Orloff, (1992), "A new concept of theoretical resolution", Ultramicroscopy 41, 181-192
9. S.-Y. Lee, F. Hu, and J. Ji, (2004), "Representation of nonrectangular features for exposure estimation and proximity effect correction in electron- beam lithography," J. Vac. Sci. Technol., B 22(6) 2929-2935
10. S J Erasmus, D M Holburn, K C A Smith (1980) "On line diffractograms for the analysis of SEM images", Inst. Phys. Conf.Ser. 52, 73-76.
11. See also A E Vladar, M T Postek, M P Davidson, (1997), 'Image Sharpness Measurement in SEM', SCANNING 20, 24-34
12. J Frank, P Bussler, R Langer and W Hoppe, (1970), "Transmission electron diffractograms" (in German), Ber. Busenges, Phys.Chem., 74, 1105-1115. See also ref. [10] for the earliest application of the technique to SEM imaging.