On the spectroscopic detection of neutral species in a low-pressure plasma containing boron and hydrogen

Plasma Sources Science and Technology

Volumn 12, Issue 4, 2003, Pages 576-589

  Lavrov, B P ^a   Osiac, M ^b,c,d   Pipa, A V ^a,b   Ropcke J ^b  

^a ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

^b Inst Niedertemperatur Plasmaphys   (Germany)

^c INSTITUTE OF ATOMIC PHYSICS   (Romania)

^d RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; DOPPLER EFFECT; HYDROGEN; PLASMA DIAGNOSTICS; SEMICONDUCTOR LASERS;

LOW-PRESSURE PLASMA; NEUTRAL SPECIES;

PLASMAS;

EID: 0344584504     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/12/4/309     Document Type: Article

References (68)

1. Albella J M, Gomez-Aleixandre C, Sanchez-Garrido O, Vazquez L and Martinez-Duart J M 1995 Surf. Coat. Technol. 70 163
2. Andujar J L, Bertran E and Polo M C 1998 J. Vac. Sci. Technol. 16 578
3. Franz D, Hollenstein M and Hollenstein C 2000 Thin Solid Films 379 37
4. Ichiki T, Momose T and Yoshida T 1994 J. Appl. Phys. 75 1330
5. Ichiki T and Yoshida T 1994 Appl. Phys. Lett. 64 851
6. Gonon P, Deneuville A, Fontaine F, Gheeraert E, Campargue A, Cheneiver M and Rodolphe S 1995 J. Appl. Phys. 78 7404
7. Breitbarth F-W, and Ducke E 1990 Contrib. Plasma Phys. 30 691
8. Janča J, Skřička L and Brablec C 1992 Plasma Chem. Plasma Process. 13 567
9. Pierson J F, Czierwiec T, Belmonte T, Michel H and Richard A 1998 Plasma Sources Sci. Technol. 7 54
10. Ricard A, Czierwiec T, Belmonte T, Bockel S and Michel H 1999 Thin Solid Films 341 1
11. Pavlovič M S, Savovič J J and Marinkovič M 2001 J. Serb. Chem. Soc. 66 535
12. Osiac M, Lavrov B P and Röpcke J 2002 J. Quant. Spectrosc. Radiat. Transfer 74 471
13. O'Brien T R and Lawler J E 1992 Astron. Astrophys. 255 420
14. Schaffnit C, Thomas L, Rossi F, Hugon R and Pauleau Y 1996 Surf. Coat. Technol. 86-87 402
15. Ohl A 1998 J. Phys. IV 8 83
16. Röpcke J, Mechold L, Käning M, Anders J, Wienhold F G, Nelson D and Zahniser M 2000 Rev. Sci. Instrum. 71 3706
17. White J U 1942 J. Opt. Soc. Am. 32 285
18. Rothman L S et al 1992 J. Quant. Spectrosc. Radiat. Transfer 48 469
19. Guelachvili G and Rao K N 1986 Handbook of Infrared Standards (Orlando, FL: Academic)
20. Husson N et al 1994 J. Quant. Spectrosc. Radiat. Transfer 52 425
21. Lavrov B P, Melnikov A S, Köning M and Röpcke J 1999 Phys. Rev. E 59 3526
22. Stitt F 1940 J. Chem. Phys. 8 981
23. Stitt F 1941 J. Chem. Phys. 9 780
24. Price W C 1948 J. Chem. Phys. 16 894
25. Anderson W E and Barker E F 1950 J. Chem. Phys. 18 698
26. Pondy P R and Peachell H C 1956 J. Chem. Phys. 25 238
27. Kreye W C and Marcus R A 1962 J. Chem. Phys. 37 419
28. Baylis A B, Pressley G A and Stafford F E 1966 J. Am. Chem. Soc. 88 2428
29. Page M, Adams G F, Binkley J S and Melius C F 1987 J. Phys. Chem. 91 2675
30. Kawaguchi K, Butler J E, Yamada C, Bauer S H, Minowa T, Kanamori H and Hirota E 1987 J. Chem. Phys. 87 2438
31. Kawaguchi K 1992 J. Chem. Phys. 96 3411
32. Pianalto F S, O'Brien L C, Keller P C and Bernath P F 1988 J. Mol. Spectrosc. 129 348
33. Rice J K, Douglass C H and Nelson H H 1990 Chem. Phys. 143 109
34. Fernando W T M L and Bernath P F 1991 J. Mol. Spectrosc. 145 392
35. Diercksen G H F, Grüner N E, Sabin J R and Oddershede J 1987 Chem. Phys. 115 15
36. Dufayard J and Nedelec O 1978 J. Chem. Phys. 69 4708
37. Gustafsson O and Rittby M 1988 J. Mol. Spectrosc. 131 325
38. Douglass C H, Nelson H H and Rice J K 1989 J. Chem. Phys. 90 6940
39. Astashkevich S A, Käning M, Käning E, Kokina N V, Lavrov B P, Ohl A and Röpcke J. 1996 J. Quant. Spectrosc. Radiat. Transfer 56 725
40. Lavrov B P and Otorbaev D K 1978 Sov. Tech. Phys. Lett. 4 574
41. Lavrov B P 1980 Opt. Spectrosc. 48 375
42. Lavrov B P and Tyutchev M V 1984 Acta Phys. Hung. 55 411
43. Drachev A I and Lavrov B P 1986 High Temp. 26 129
44. Lavrov B P, Ostrovskii V N and Ustimov V I 1980 Sov. Phys.-Tech. Phys. 25 1208
45. Crosswhite H M (ed) The Hydrogen Molecule Wavelength Tables of Gerhard Heinrich Dieke (New York: Wiley)
46. Frisch S E 1963 Optical Spectra of Atoms ed M M Kahl (Leningrad: State Publishing House Moscow) p 412 (in Russian)
47. Bromander J 1971 Phys. Scri. 4 61
48. Bergström H, Feris G W, Hallstadius H, Lundberg H, Person A and Wahlstöm C G 1988 Z. Phys. D-Atoms Mol. Clusters 8 17
49. Carlson, J, Jönsson, P, Sturesson L and Fisher C F 1994 Phys. Rev. A 49 3426
50. Abroyan M A, Kagan Y M, Kolokolov N B and Lavrov B P 1975 12th Int. Conf. on Phenomena in Ionized Gases (ICPIG) (Eindhoven) p 101
51. Abroyan M A, Demidov V I, Kagan Y M, Kolokolov N B and Lavrov B P 1975 Opt. Spectrosc. 39 12, 21
52. Devjatov A M, Kalinin A V and Miiovich S R 1991 Opt. Spectrosc. 71 525
53. Schultz-von der Gathen V and Döbele H F 1996 Plasma Chem. Plasma Process. 16 461
54. Lavrov B P and Pipa A V 2002 Opt. Spectrosc. 92 709
55. Pipa A V, Lang N, Lavrov B P and Röpcke J 2001 ECAMP VII-Frühjahrstagung Plasmaphysik der DPG (Berlin, 2001) Verhandlg.d. DPG 5/2001, p 169
56. Lang N, Käning M, Röpcke J, Kalatchev M and Lavrov B P 1999 Frontiers in Low Temperature Plasma Diagnostics III (Saillon 1999) (Conf. Proc.) p 253
57. Lavrov B P and Prosikhin V P 1988 Opt. Spectrosc. 64 298
58. Lavrov B P 1977 Opt. Spectrosc. 42 250
59. Landau L D and Lifshitz E M 1977 Quantum Mechanics 3rd edn (Oxford: Pergamon)
60. Lavrov B.P. Ostrovkii VN and Ustimov V 1979 Sov. Phys. JETP 49 772
61. Lavrov B P, Ostrovkii V N and Ustimov V I 1979 Opt. Spectrosc. 47 30
62. Lavrov B P, Ostrovkii V N and Ustimov V I 1981 J. Phys. B: At. Mol. Phys. 14 4701
63. Behringer K 1991 Plasma Phys. Control. Fusion 9 997
64. Hassouni K, Grotjohnn T A and Gicquel A 1999 J. Appl. Phys. 86 134
65. Gicquel A, Chenevier M, Hassouni K, Tserepi A and Dubus M 1998 J. Appl. Phys. 83 7504
66. Thomas L, Jauberteau J L, Jaberteau I, Aubreton J and Catherinot A 1997 Plasma Chem. Plasma Process. 17 193
67. Alexandrov V M, Flender U, Kolokolov N B, Rykova O V and Wiesemann K 1996 Plasma Sources Sci. Technol. 5 523
68. Ladenburg R and Levy S 1930 Z. Phys. VI 189