Modeling of hydrocarbon species in ECR methane plasmas

Journal of Nuclear Materials

Volumn 313-316, Issue SUPPL., 2003, Pages 434-438

  Matyash, K ^a   Schneider, R ^a   Bergmann, A ^a   Jacob, W ^a   Fantz, U ^b   Pecher, P ^c  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b UNIVERSITY OF AUGSBURG   (Germany)

^c Leybold Optics GmbH   (Germany)

Author keywords

Computer modeling; Neutrals in plasma; Plasma; Sheaths

Indexed keywords

COMPUTER SIMULATION; MAGNETIC FIELDS; METHANE; MONTE CARLO METHODS; REACTION KINETICS;

INTER-SPECIES INTERACTIONS;

PLASMAS;

EID: 0037346759     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3115(02)01410-1     Document Type: Conference Paper

References (14)

1. von Keudell A., Schwarz-Selinger T., Jacob W., Stevens A. J. Nucl. Mater. 290-293:2001;231.
2. U. Fantz, IPP Report, 10/21 (2002).
3. Reinke P., Schelz S., Jacob W., Möller W. J. Vac. Sci. Technol. A. 10:1992;434.
4. P. Pecher, IPP-Report, 9/118 1998 (in German).
5. A.B. Ehrhardt, W.D. Langer, Report PPL-2477, Plasma Physics Laboratory, Princeton University, Princeton, USA (1988).
6. Riccardi C., Barni R., Fontanesi M. Czech. J. Phys. 50(Suppl. S3):2000;389.
7. Herrebout D., Bogaerts A., Yan M., Gijbels R., Goedheer W., Dekempeneer E. J. Appl. Phys. 90:2001;570.
8. Jacob W. Thin Solid Films. 326:1998;1.
9. W. Jacob, P. Pecher, in: H.F. Doebele et al. (Eds.) Proceedings of the Workshop 'Frontiers in Low Temperature Plasma Diagnostics II' Bad Honnef, Germany, 1997, Arbeitsgemeinschaft Plasmaphysik, Bochum, p. 155.
10. Bergmann A. Phys. Plasmas. 1:1994;3598.
11. K. Reinmüller, IPP-Report, 5/79 (1998) (in German).
12. Takizuka T., Abe H. J. Comput. Phys. 25:1977;205.
13. Birdsall C.K. IEEE Trans. Plasma Sci. 19:1991;65.
14. Janev R.K., Langer W.D., Evans K. Jr., Post D.E. Jr. Elementary Processes in Hydrogen-Helium Plasmas. 1987;Springer-Verlag.