Design issues in soi-based high-sensitivity piezoresistive cantilever devices

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4693, Issue , 2002, Pages 588-597

  Kassegne, Samuel ^a   Madou, Marc ^a   Whitten, Ralph ^a   Zoval, Jim ^a   Mather, Elizabeth ^a   Sarkar, Kamal ^a   Hodko, Dalibor ^a   Maity, Sandipan ^b  

^a Nanogen Inc USA   (United States)

^b European Headquarter and Development Center   (United States)

Author keywords

Finite element analysis; Hybridization; Mems; Micro mechanical array; Parametric design; Piezoresistive cantilevers; Stress concentration; Unlabeled detection

Indexed keywords

ALGORITHMS; CANTILEVER BEAMS; DNA; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; SENSITIVITY ANALYSIS; SILICON ON INSULATOR TECHNOLOGY; STRESS CONCENTRATION;

CANTILEVER DEVICES;

PIEZOELECTRIC DEVICES;

EID: 0036028461     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.475257     Document Type: Article

References (10)

1. Fritz, J., M.K. Baller, H.P. Lang, H. Rothuizen, P. Vettiger, E. Meyer, H.-J. Guntherodt, C. Gerber, J.K. Gimzewski. Translating Bimolecular Recognition Into Nanomechanics. Science, 2000. 288 (April): p. 316-318.
2. Hansen, K.M., H.-F. Ji, G. Wu, R. Datar, R. Cote, A. Majumdar, and T. Thundat. Cantilever-Based Optical Deflection Assay for Discrimination of DNA Single-Nucleotide Mismatches. Analytical Chemistry, 2001.
3. Harley, J.A. and T.W. Kenny. High-Sensitivity Cantilevers Under 1000A Thick. Applied Physica Letters, 1999. 75 (2): p. 289-291.
4. Moulin, A.M., S.J. O'Shea, M.E. Welland. Microcantilever-Based Biosensors. Ultramicroscopy, 2000. 82: p. 23-31.
5. Thundat, T., P.I. Oden, and R.J. Warmack. Microcantilever Sensors. Microscale Thermophysical Engineering, 1997. 1089-3954/97: p. 1:185-199.
6. Thundat, T., L.A. Bottomly, S. Meller, W.H. Velander and R. Van Tassell. Vapor Detection Using Resonating Microcantilevers. Anal. Chem., 1995. 67(3): p. 519-521.
7. Thundat, T., L.A. Bottomly, S. Meller, W.H. Velander and R. Van Tassell. Microcantilever Immunosensors, in Immunoassays: Methods and Protocols, A.L. Ghindilis, A.R. Pavlov, and P.B. Atanajov, Editors. 2001, Humana Press: Totawa, N.J.
8. Stoney, G. Gerald. The Tension of Metallic Films Deposited by Electrolysis. Proceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character, Volume 82, Issue 553 (May 6, 1909), 172-175.
9. Tortonese, et. al. Atomic Resolution with An Atomic Force Microscope Using Piezoresistive Detection. Appl. Phys. Letters. 62(8), 22 February 1993.
10. Madou, Marc., Fundamentals of Micro-fabrication, CRC, 1997.