Current trends in electron kinetics of gas discharges

Plasma Sources Science and Technology

Volumn 12, Issue 4, 2003, Pages

  Tsendin, L D ^a  

^a PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; DIFFUSION IN GASES; ELECTRIC SPACE CHARGE; ELECTRON GAS; ELECTRON TRAPS; ELECTRONIC DENSITY OF STATES; IMPACT IONIZATION; POLYNOMIALS; RELAXATION PROCESSES;

ELECTRON DISTRIBUTION FUNCTION ANISOTROPY; ELECTRON IMPACT IONIZATION; ELECTRON KINETICS; GAS DISCHARGE; SPACE CHARGE FIELD;

KINETIC THEORY OF GASES;

EID: 0345015538     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/12/4/320     Document Type: Article

References (51)

1. Tsendin L D 1995 Plasma Sources Sci. Technol. 4 200-11
2. Shkarofsky I, Johnston T and Bachinsky M 1966 The Particle Kinetics of Plasmas (New York: Addison-Wesley)
3. Bernstein I B and Holstein T 1954 Phys. Rev. 94 1475
4. Tsendin L D 1974 Sov. Phys. - JETP 39 805
5. Tsendin L D 1978 Sov. Phys. - Tech. Phys. 23 890-4
6. Kaganovich I D et al 2000 Phys. Rev. E 61 1875-89.
7. Dmitriev A P and Tsendin L D 1981 Sov. Phys. - JETP 54 1071-5
8. Kortshsgen U, Pukropski I and Tsendin L D 1995 Phys. Rev. E 51 6063-78
9. Kortshagen U, Parker G J and Lawler J E 1996 Phys. Rev. E 54 6746
10. Kudryavtsev A A and Tsendin L D 1999 Tech. Phys. 44 1290-7
11. Langmuir I 1925 Phys. Rev. 26 585-613
12. Gabor D, Ash E A and Dracott D 1955 Nature 176 916-19
13. Benke Yu, Kagan Yu M and Milenin V M 1968 Sov. Phys. - Tech. Phys. 13 989
14. Benke Yu, Kagan Yu M and Milenin V M 1965 Beitr. Plasma Phys. 5 479
15. Kagan Yu M 1970 Spectroscopy of Gas Discharge Plasmas (Leningrad: Nauka) pp 201-23 (in Russian)
16. Milenin V M and Timofeev N A 1978 Sov. Phys. - Tech. Phys. 23 1048
17. Rompe R, Ullrich S and Wolf H 1961 Beitr. Plasma Phys. Bd.4 S.245-53
18. Hirsch E N 1966 Int. J. Electron. 19 537-41
19. Gierke G, Ott W and Schwirzke F 1961 Proc. 6th IGPIG (Munchen, 1961) vol 11, p 1412
20. Ott W 1963 Ein Versuch zur Klarung des Langmuir-Paradoxus Preprint Inst. Plasma Phys. (Munchen, 1963) IPP 2/19, 27S
21. Harp R and Kino G S 1963 Proc. 8th IGPIG (Paris, 1963) vol 3, p 45
22. Crawford F W and Self S A 1965 Int. J. Electron. 18 569-77
23. Rayment S W and Twiddy N D 1968 Proc. R. Soc. A 340 87-98
24. Chen F 1984 Introduction to Plasma Physics and Controlled Fusion 2nd edn (New York: Plenum)
25. Tsendin L D and Golubovsky Yu B 1977 Sov. Phys. - Tech. Phys. 22 1066
26. McDaniel E W 1964 Collision Phenomena in Ionized Gases (New York: Wiley)
27. Vas'kov V V, Gurevich A V and Dimant Ya I 1983 Sov. Phys. - JETP 57 310
28. Alijev Yu M, Kaganovich I D and Schlueter H 1997 Phys. Plasmas 4 2413
29. Ganashev I, Sugai H and Tsendin L D 2002 XYI ESCAMPIG (Grenoble, 2002) poster 2-5, vol 1, p 217
30. Godyak V A 1986 Sov. Radio Frequency Discharge Research (Delphic, Falls Church, 1986)
31. Chirikov B V 1979 Phys. Rep. 52 265
32. Lichtenberg A J and Lieberman M A 1983 Regular and Stochastic Motion (New York: Wiley)
33. Godyak V A and Piejak R B 1990 Phys. Rev. Lett. 65 996
34. Godyak V A 1998 Electron Kinetics and Applications of Glow Discharges ed U Kortshagen and L D Tsendin (New York: Plenum) p 241
35. Bibinov N, Bolshukhin D, Bratsev V, Kokh D and Wiesemann K 1998 Rev. Sci. Instrum. 69 1200
36. Kokura H and Sugai H 2000 Japan. J. Appl. Phys. 39 2847
37. Mizeraczyk J 1987 J. Phys. D: Appl. Phys. 20 429
38. Kudryavtsev A A and Tsendin L D 2002 Tech. Phys. Lett. 28
39. Golubovsky Yu B, Zakharova V M, Pasunkin V I and Tsendin L D 1981 Sov. J. Plasma Phys. 7 620-8
40. Arslanbekov R R, Khromov N A and Kudryavtsev A A 1994 Plasma Sources Sci. Technol. 3 528-38
41. Sugai H, Toioda H, Nagano K and Isomura N 1995 Plasma Sources Sci. Technol. 4 366
42. Sugai H et al 2001 Plasma Sources Sci. Technol. 10 378
43. Fedorov V L 1985 Sov. Phys.-Tech. Phys. 30 554
44. Mezentsev A P, Mustafaev A S and Fedorov V L 1985 Sov. Phys. - Tech. Phys. 30 322
45. Woods R C and Sudit I D 1994 Phys. Rev. E 50 2222-38
46. Ishijima T, Uenuma M, Tsendin L D and Sugai H 2002 XYI ESCAMPIG (Grenoble, 2002) vol 1, p 221, poster #2-7
47. Tsendin L D 1998 Electron Kinetics and Applications of Glow Discharges ed U Kortshagen and L D Tsendin (New York: Plenum) p 1
48. Franklin R 1976 Plasma Phenomena in Gas Discharges (Oxford: Clarendon)
49. Kagan Yu M and Perel V I 1964 Sov. Phys. - Usp. 6 763
50. Godyak V 1990 Plasma Surface Interaction and Processing of Materials (NATO ASI Series E) vol 176 (Dordrecht: Kluwer) p 95
51. Allen J 1995 Plasma Sources Sci. Technol. 4 234