Characterization and modeling of voltage and temperature dependence of capacitance in Al2O3-laminated Ta2O5 metal-insulator-metal capacitor

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 5 A, 2007, Pages 2973-2977

  Takeda, Kenichi ^a   Ishikawa, Tsuyoshi ^a   Mine, Toshiyuki ^a   Imai, Toshinori ^a   Fujiwara, Tsuyoshi ^a  

^a HITACHI LTD   (Japan)

Author keywords

Al2O3; Capacitance density; Metal insulator metal (MIM) capacitor; Ta2O5; Temperature coefficient of capacitance; Voltage linearity

Indexed keywords

ALUMINA; CAPACITORS; ELECTRIC INSULATORS; INTERFACES (MATERIALS); TANTALUM COMPOUNDS;

EFFECTIVE OXIDE THICKNESS (EOT); TEMPERATURE COEFFICIENT OF CAPACITANCE; VOLTAGE LINEARITY;

MIM DEVICES;

EID: 34547860958     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.2973     Document Type: Article

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